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CHINESE / ENGLISH
CHINESE / ENGLISH

    2018年

  • 2018December

    The first 14nm hard mask ACHM machine is manufactured to the client
  • 2018October

    12-inch ALD is validated by client 14nm process

    2017年

  • 2017December

    First mass-produced 3D NAND PECVD manufactured to client
  • 2017October

    PF-300T breaks through 1 million sheets in Zhongxin International Production Line
  • 2017September

    SAP system on line
  • 2017August

    Complete the third round of financing

    2016年

  • 2016December

    Started production in new factory
  • 2016April

    Completion of 12 inch PECVD project under “11th Five Year Plan” by “National Key S&T Special Project”
  • 2016March

    Shipped the first 12 inch ALD equipment to customer site

    2015年

  • 2015December

    Received 3D NAND PECVD project grant from the “National Key S&T Special Project” under “13th Five Year Plan”
  • 2015September

    Completed second round of finance, obtained funding and support from “National Integrated Circuit Industry Investment Fund”
  • 2015March

    Achieved 10 thousand wafers in SMIC production line

    2014年

  • 2014December

    Received approval as “Liaoning Thin Film Equipment Engineering Research Center”
  • 2014August

    Received first order of production equipment PF-300T from SMIC
  • 2014May

    Completed first round of finance

    2013年

  • 2013December

    Received green light from SMIC production line for PF-300T equipment
  • 2013May

    Received first sales order for 12 inch PECVD equipment PF-300

    2012年

  • 2012December

    Launched 12 inch multi-chamber PECVD equipment PF-300T

    2011年

  • 2011October

    Shipped the first 12 inch PECVD equipment to SMIC for online test
    Completed the development of 2-12 inch SC-300 equipment

    2010年

  • 2010October

    Completed the installation of the first 12 inch PECVD equipment prototype
  • 2010May

    Established Shenyang Piotech Co., Ltd

    2009年

  • 2009September

    Began design process of 12 inch PECVD project

    2008年

  • 2008December

    Received 12 inch PECVD project grant from “National Key S&T Special Project” under “11th Five Year Plan”
  • 2008April

    Received first sales order of CC1-150 equipment

    2007年

  • 2007June

    Completed the installation of First CC1-150 equipment

    2006年

  • 2006July

    Established PECVD department in Shenyang Technology Development Co., Ltd. CAS

>
2018年
  • December

    2018
    The first 14nm hard mask ACHM machine is manufactured to the client
  • October

    2018
    12-inch ALD is validated by client 14nm process
2017年
  • December

    2017
    First mass-produced 3D NAND PECVD manufactured to client
  • October

    2017
    PF-300T breaks through 1 million sheets in Zhongxin International Production Line
  • September

    2017
    SAP system on line
  • August

    2017
    Complete the third round of financing
2016年
  • December

    2016
    Started production in new factory
  • April

    2016
    Completion of 12 inch PECVD project under “11th Five Year Plan” by “National Key S&T Special Project”
  • March

    2016
    Shipped the first 12 inch ALD equipment to customer site
2015年
  • December

    2015
    Received 3D NAND PECVD project grant from the “National Key S&T Special Project” under “13th Five Year Plan”
  • September

    2015
    Completed second round of finance, obtained funding and support from “National Integrated Circuit Industry Investment Fund”
  • March

    2015
    Achieved 10 thousand wafers in SMIC production line
2014年
  • December

    2014
    Received approval as “Liaoning Thin Film Equipment Engineering Research Center”
  • August

    2014
    Received first order of production equipment PF-300T from SMIC
  • May

    2014
    Completed first round of finance
2013年
  • December

    2013
    Received green light from SMIC production line for PF-300T equipment
  • May

    2013
    Received first sales order for 12 inch PECVD equipment PF-300
2012年
  • December

    2012
    Launched 12 inch multi-chamber PECVD equipment PF-300T
2011年
  • October

    2011
    Shipped the first 12 inch PECVD equipment to SMIC for online test
    Completed the development of 2-12 inch SC-300 equipment
2010年
  • October

    2010
    Completed the installation of the first 12 inch PECVD equipment prototype
  • May

    2010
    Established Shenyang Piotech Co., Ltd
2009年
  • September

    2009
    Began design process of 12 inch PECVD project
2008年
  • December

    2008
    Received 12 inch PECVD project grant from “National Key S&T Special Project” under “11th Five Year Plan”
  • April

    2008
    Received first sales order of CC1-150 equipment
2007年
  • June

    2007
    Completed the installation of First CC1-150 equipment
2006年
  • July

    2006
    Established PECVD department in Shenyang Technology Development Co., Ltd. CAS
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