Product Series
Product introduction

PF-300T Astra
12 inch PEALD equipment

Product Introduction
PF-300T Astra series is an atomic layer deposition equipment independently developed by Piotech. The ALD process chamber is mounted on the same high productivity platformas with PECVD products, which meets the demand for equipment production capability. Piotech ALD products have been used in the fields of advanced chip manufacturing, advanced packaging (TSV), and the research and development of front-end process (FEOL) below 14nm. At present, we are offering high-quality PEALD films, such as SiO2 and SiN films, and are developing metal oxide and metal nitride film processes.

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