Product Series
Product introduction

12 inch, 8 inch PECVD equipment

Product Introduction

PF-300T is a product series independently designed and developed by Piotech, while undertaking the national "11th Five-Year Plan" National Key Projects. The equipment can be used for deposition of all related common layer dielectric films, and has been widely used in the production of 40-28nm integrated circuit devices, with the extendibility to 14nm and below technologies nodes. With further R&D efforts, its capability has extended to advanced film deposition, covering ACHM hard mask with high etch selectivity, low dielectric constant film, NDC etch barrier layer, and ULK film with ultra-low dielectric constant. With these broad offerings, PT-300T can meet the customers’requirements for multiple technology nodes.

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