Shenyang Piotech Co., Ltd., the original PECVD Department of ChineseAcademyofSciences,successfully sold the first PECVD (CC1-150) on April 29, 2008.
The technical staff of our team mastered all the skills of PECVD equipment (CC1-150) and controlled the industry chain of equipment production in less than two years. According to customer’s requirements, we completedthe process reliability test of the equipment silicon oxide, silicon nitride and silicon oxynitride film氧which was highly praised by the customer. It was considered to be the equipment with the best uniformity and reliability in the production line of the customer.
Compared to the same type of equipment abroad, the film uniformity, repeatability and reliability of the 4-6 inches PECVD equipment independently produced by Shenyang Piotech Co., Ltd., Chinese local company, has certain advantages. Also, the price is cheaper than the refurbished second-hand original equipment. The update and upgrade of hardware and software design in equipment control system has also become a major attraction and get the customer approval. In addition, localization rate of equipment parts reaches more than 70%, which significantly reduce the maintenance cost of equipment, shorten the purchase cycle and save the inventory costs of customer.
The locally manufactured PECVD equipment can enter the front-end semiconductor production line process. It fills the domestic gap and can replace the imported products. This means that our semiconductor equipment manufacture enters a new phase.