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Shenyang Piotech Country's First Factory-made 12-inch prototype PECVD

Date:2011年11月24日 09:16

Abstract:

 

 Shenyang PiotechTechnology Extension 02 countries undertake major scientific and technological projects. One of which is a "90-65 nanometers plasma enhanced chemical vapor deposition research and application equipment" to achieve substantive breakthrough. OnOctober 21, Shenyang PiotechTechnology Co., Ltd. held a "national 02 major science and technology first domestic factory prototype 12-inch PECVD ceremony", Zhao Changyi, director of the Shenyang Municipal People's Congress and other guests attended the ceremonyand praised Jing Technology IC for the IC manufacturing achievements it made.This is China's first independently developed 12 inches PECVD equipment is the key IC equipment made a major breakthrough.

  Equipment technology has now completed 3000 and 10000 reliability tests, the indicators have reached the design requirements,and the equipment will be shipped to China's largest chip foundry – SMIC,who will perform online.After testing the device to enter the market, industrial production of12 inches PECVD equipment factory prototype showed that China has successfully integrated high-end devices (PECVD) research and manufacturing technology has reached the international advancement level, so that our IC film equipment manufacturing level and international IC Manufacturing mainstream technical level to keep pace, and improve the important domestic semiconductor equipment industry chain, to break the market monopoly of foreign products and technologies, so that our ability to participate in international competition in the IC-end equipment market, to enhance the autonomy of IC manufacturing equipment innovation capability and core competitiveness, has important strategic significance. At present, the company's productsexpanded from 4-6 inches to 8 inches automatic,2-12 inches manual,and12 inches automaticin PECVD full range of products, in addition to the traditional application of integrated circuit manufacturing.The companyhas also successfully expanded into the light waveguide manufacturing. Technology has reached the international advancement level,filling in the gaps.

 

 

 

 

 

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